Publications

Research made with our probes.

93 journal articles and conference papers since 2009 in which TeraSpike near-field microprobes and Protemics systems were used — from semiconductor metrology to metamaterials and pharmaceutics. Links lead to the original publications.

2025

  1. Near-Field Semiconductor Imaging and Classification Enabled by Signal Cancellation Using Truncated mm-Wave Silicon Waveguide

    Y. Kawamoto, D. C. Gallego; A. Rivera-Lavado et al.

    IEEE Sensors Journal, vol. 25, no. 11, pp. 20648-20657 (2025) · DOI 10.1109/JSEN.2025.3562280

    Semiconductor & chip inspectionWaveguides & on-chip THzBio, pharma & chemistry

  2. AFM-based nanoplowing lithography for fabricating plasmonic gaps enabling enhanced light-matter interactions

    Jeong-Sik Jo, Hyeji Son, Jinho Lee et al.

    Applied Surface Science, Volume 691, 162667 (2025) · DOI 10.1016/j.apsusc.2025.162667

    Metamaterials & plasmonics

  3. Near-field terahertz time-domain spectroscopy for in-line electrical metrology of semiconductor integration processes for memory

    Jun, S., Baek, I., Park, S. et al.

    Commun Eng 4, 30 (2025) · DOI 10.1038/s44172-025-00356-y

    Semiconductor & chip inspection

2024

  1. Sparse-deconvolution terahertz near-field microprobe tomography enabling non-destructive inspection of small solid dosage forms

    Matthias Wolfgang, Alexander Michalski, Simon Sawallich and Michael Nagel

    International Journal of Pharmaceutics, Volume 667, Part B, 25 December 2024, 124996 · DOI 10.1016/j.ijpharm.2024.124996

    Bio, pharma & chemistryProbe & instrument developmentProtemics co-author

  2. Graphene and Silver Nanoparticle-Coated Poly(vinyl) Alcohol/Graphene Oxide/Dioctyl Terephthalate: Bis(2-hydroxyethyl) Terephthalate Composite Strain Sensors

    Barış Şimşek, Jasper Ruhkopf, Ulrich Plachetka, et al.

    ACS Applied Polymer Materials 2024 6 (16), 9521-9532 · DOI 10.1021/acsapm.4c01259

    2D materials & thin filmsBio, pharma & chemistry

  3. Directional Coupling to a λ/5000 Nanowaveguide

    Alessandro Tuniz, Sabrina Garattoni, Han-Hao Cheng and Giuseppe Della Valle

    ACS Nano Article ASAP, October 21, 2024 · DOI 10.1021/acsnano.4c09434

    Waveguides & on-chip THz

2023

  1. Photoconductive THz near-field detectors operated with a 1550 nm cw-laser system for high spatial-and spectral-resolution measurements

    S. Sawallich, A. Deninger, A. Michalski, et al.

    2023 48th International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz) · DOI 10.1109/IRMMW-THz57677.2023.10299159

    2D materials & thin filmsProbe & instrument developmentProtemics co-author

  2. Microprobe-based Terahertz Near-field Imaging of Highly Scattering Pharmaceutical Coatings on Small Tablets

    M. Wolfgang, A. Michalski, M. Nagel, et al.

    2023 48th International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz) · DOI 10.1109/IRMMW-THz57677.2023.10299100

    Bio, pharma & chemistryProbe & instrument developmentProtemics co-author

  3. On-Chip THz Time-Domain Spectroscopy Sensor with Adjustable Sample Interaction by a Daughterboard

    J. Lee, S. Sawallich, M.C. Lemme, et al.

    2023 48th International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz) · DOI 10.1109/IRMMW-THz57677.2023.10298930

    Semiconductor & chip inspectionWaveguides & on-chip THzProtemics co-author

  4. A novel scattering-type THz microprobe with integrated source and detector for contact-free, high-speed surface imaging at sub-μm-resolution

    M. Priwisch, M. Nagel, A. Michalski, et al.

    2023 48th International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz) · DOI 10.1109/IRMMW-THz57677.2023.10298974

    Probe & instrument developmentProtemics co-author

  5. On-Chip Time-Domain Terahertz Spectroscopy of Superconducting Films below the Diffraction Limit

    Alex M. Potts, Abhay K. Nayak, Michael Nagel, et al.

    Nano Lett. 2023, 23, 9, 3835–3841. · DOI 10.1021/acs.nanolett.3c00412

    Semiconductor & chip inspectionWaveguides & on-chip THzUltrafast & fundamental physicsProtemics co-author

2022

  1. Real-space imaging and control of chiral anomaly induced current at room temperature in topological Dirac semimetal

    B.C. Park, T. Ha, K.I. Sim, et al.

    Science Advances, Vol. 8, Issue 47 (2022). · DOI 10.1126/sciadv.abq2479

    Ultrafast & fundamental physics

  2. High-Frequency Sheet Conductance of Nanolayered WS2 Crystals for Two-Dimensional Nanodevices

    Stan E.T. ter Huurne, Adonai Rodrigues Da Cruz, Niels van Hoof, et al.

    ACS Appl. Nano Mater. (2022). · DOI 10.1021/acsanm.2c03517

    Semiconductor & chip inspection2D materials & thin films

  3. Flexible Terahertz Photonic Light-Cage Modules for In-Core Sensing and High Temperature Applications

    Alessio Stefani, Boris T. Kuhlmey, Justin Digweed, et al.

    ACS Photonics 2022 (2022). · DOI 10.1021/acsphotonics.2c00386

    Waveguides & on-chip THz

  4. In situ cell detection using terahertz near-field microscopy

    Zaoxia Li, Ziyi Zang, Jie Wang, et al.

    IEEE Transactions on Terahertz Science and Technology (2022). · DOI 10.1109/TTHZ.2022.3170010

    Bio, pharma & chemistryProbe & instrument development

  5. Terahertz near-field spectroscopy for various applications

    Changwon Seo and Teun-Teun Kim

    J. Korean Phys. Soc. (2022). · DOI 10.1007/s40042-022-00404-2

    Probe & instrument development

2021

  1. Review of THz-based semiconductor assurance

    John True, Chengjie Xi, Nathan Jessurun, et al.

    Optical Engineering, 60(6), 060901 (2021). · DOI 10.1117/1.OE.60.6.060901

    Semiconductor & chip inspection

  2. Terahertz Based Machine Learning Approach to Integrated Circuit Assurance

    J. True, C. Xi, N. Jessurun, et al.

    2021 IEEE 71st Electronic Components and Technology Conference (ECTC), 2021, pp. 2235-2245, doi: 10.1109/ECTC32696.2021.00351 (2021). · DOI 10.1109/ECTC32696.2021.00351

    Semiconductor & chip inspection

  3. Mapping Ultrafast Electric Fields using Terahertz Microscopy

    Niels J.J.van Hoof

    Eindhoven : Technische Universiteit Eindhoven, 135 p.(2021). · Publisher page

    Probe & instrument developmentUltrafast & fundamental physics

  4. Unveiling Symmetry Protection of Bound States in the Continuum with Terahertz Near-field Imaging

    Niels J.J.van Hoof, Diego R. Abujetas, Stan E.T. ter Huurne, et al.

    arXiv:2105.11937 [physics.optics] (2021). · Publisher page

    Probe & instrument development

  5. Large-area integration of two-dimensional materials and their heterostructures by wafer bonding

    Arne Quellmalz, Xiaojing Wang, Simon Sawallich et al.

    Nature Communications volume 12, Article number: 917 (2021). · Publisher page

    Semiconductor & chip inspection2D materials & thin filmsProtemics co-author

  6. Graphene-based thin-films for flexible applications inspected by high-resolution Terahertz near-field inspection

    Simon Sawallich, Burkay Uzlu, Martin R. Lohe et al.

    46th International Conference on Infrared, Millimeter and Terahertz Waves (IRMMW-THz) (2021). · Publisher page

    2D materials & thin filmsProtemics co-author

  7. Terahertz Near-field Inspection of Metallic Nano-gap Grating for Contrast-Enhanced Interaction with Two-dimensional Materials

    Jimin Lee, Simon Sawallich, Joachim Mayer and Michael Nagel

    46th International Conference on Infrared, Millimeter and Terahertz Waves (IRMMW-THz) (2021). · Publisher page

    2D materials & thin filmsMetamaterials & plasmonicsProtemics co-author

  8. High-resolution Terahertz near-field reflection measurements for complementary non-destructive inspection of integrated circuits

    Alexander Michalski, Simon Sawallich, John True et al.

    46th International Conference on Infrared, Millimeter and Terahertz Waves (IRMMW-THz) (2021). · Publisher page

    Semiconductor & chip inspectionProtemics co-author

  9. A Terahertz s-SNOM tip with integrated photoconductive emitter switch evaluated on an AFM-system platform

    S. Schäffer, Y. Loth, M. Nagel et al.

    46th International Conference on Infrared, Millimeter and Terahertz Waves (IRMMW-THz) (2021). · Publisher page

    2D materials & thin filmsProbe & instrument developmentProtemics co-author

  10. Stacking of Two-Dimensional Materials to Large-Area Heterostructures by Wafer Bonding

    Arne Quellmalz, Simon Sawallich, Maximilian Prechtl et al.

    Conference on Lasers and Electro-Optics (CLEO) (2021). · Publisher page

    Semiconductor & chip inspection2D materials & thin filmsProtemics co-author

2020

  1. Wafer-scale inspection of graphene conductivity by THz near-field scanning: As-grown on sapphire and after transfer to SiO2/Si

    Alexander Michalski, Simon Sawallich, Simonas Krotkus, et al.

    45th International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz), (2020). · Publisher page

    Semiconductor & chip inspection2D materials & thin filmsProbe & instrument developmentProtemics co-author

  2. Investigation of THz imaging artifacts generated by oversampling and interpolation of diffraction-limited low-resolution data

    Simon Sawallich, Alexander Michalski and Michael Nagel

    45th International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz), (2020). · Publisher page

    Probe & instrument developmentProtemics co-author

  3. A novel scattering-type SNOM-tip featuring a micro-integrated bias-free optically driven terahertz pulse emitter

    M. Nagel, S. Sawallich, A. Michalski, et al.

    45th International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz), (2020). · Publisher page

    Probe & instrument developmentProtemics co-author

  4. A 1550-nm-wavelength compatible photoconductive microprobe transceiver for Terahertz near-field reflection measurements

    Alexander Michalski, Simon Sawallich and Michael Nagel

    45th International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz), (2020). · Publisher page

    2D materials & thin filmsProbe & instrument developmentProtemics co-author

  5. Terahertz Spoof Surface Plasmonic Logic Gates

    Mingrui Yuan, Qingwei Wang, Yanfeng Li, et al.

    iScience, (2020). https://doi.org/10.1016/j.isci.2020.101685 · DOI 10.1016/j.isci.2020.101685

    Metamaterials & plasmonics

  6. Spin–orbit torque switching of a ferromagnet with picosecond electrical pulses

    Kaushalya Jhuria, Julius Hohlfeld, Akshay Pattabi, et al.

    Nature Electronics, (2020). https://doi.org/10.1038/s41928-020-00488-3 · DOI 10.1038/s41928-020-00488-3

    Semiconductor & chip inspectionUltrafast & fundamental physics

  7. Identifying Fibrillization State of Aβ Protein via Near-Field THz Conductance Measurement

    Chaejeong Heo, Taewoo Ha, Chunjae You, et al.

    ACS Nano Article ASAP. · DOI 10.1021/acsnano.9b08572

    Bio, pharma & chemistry

  8. Single cell imaging with terahertz near-field scanning microscopy

    Zaoxia Li, Shihan Yan, Ziyi Zang, et al.

    Cell Prolif. 2020; 00:e12788. · DOI 10.1111/cpr.12788

    Bio, pharma & chemistryProbe & instrument development

  9. Guided terahertz pulse reflectometry with double photoconductive antenna

    Mingming Pan, Quentin Cassar, Frédéric Fauquet et al.

    Applied Optics Vol. 59, Issue 6, pp. 1641-1647 (2020) · DOI 10.1364/AO.381646

    2D materials & thin filmsMetamaterials & plasmonicsWaveguides & on-chip THzProbe & instrument development

  10. Terahertz surface plasmonic waves: a review

    Xueqian Zhang, Quan Xu, Lingbo Xia et al.

    Advandec Photonics 2020, 014001-1, Vol 2(1) · DOI 10.1117/1.AP.2.1.014001.full

    Metamaterials & plasmonics

2019

  1. THz near-field inspection of metamaterials for bio-sensing applications featuring single-resonator read-out capability

    Simon Sawallich, Alexander Michalski, Bartos Chmielak, et al.

    44th International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz), (2019). · Publisher page

    Metamaterials & plasmonicsBio, pharma & chemistryProtemics co-author

  2. Advanced photoconductive Terahertz near-field microprobes for 1550 nm wavelength operation based on InGaAs:Rh

    Michael Nagel, Alexander Michalski, Simon Sawallich, et al.

    44th International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz), (2019). · Publisher page

    2D materials & thin filmsProbe & instrument developmentProtemics co-author

  3. Terahertz Near-field Inspection for High-resolution Conductivity and Mobility Mapping of Large-area Graphene

    Alexander Michalski, Simon Sawallich, Michael Nagel

    44th International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz), (2019). · Publisher page

    2D materials & thin filmsProtemics co-author

  4. High-Resolution THz Imaging for Optimized polySi Patterning Process

    A. Mewe, M. Stodolny, P. Manshanden, et al.

    36th European Photovoltaic Solar Energy Conference and Exhibition, pp. 201-204 (2019)

    Semiconductor & chip inspection

  5. Industrial Applications of Terahertz Sensing: State of Play

    M. Naftaly, N. Vieweg and A. Deninger

    Sensors 2019, 19(19), 4203 · DOI 10.3390/s19194203

    Semiconductor & chip inspection

  6. Role of Substrate Surface Morphology on the Performance of Graphene Inks for Flexible Electronics

    J. Ruhkopf, S. Sawallich, M. Nagel, et al.

    ACS Applied Electronic Materials 2019 1 (9), 1909-1916 · DOI 10.1021/acsaelm.9b00413

    Semiconductor & chip inspection2D materials & thin filmsProtemics co-author

  7. Terahertz Time‐Domain Spectroscopy and Near‐Field Microscopy of Transparent Silver Nanowire Networks

    Niels van Hoof, Matteo Parente, Andrea Baldi and Jaime Gómez Rivas,

    Adv. Optical Mater. 2019, 1900790. · DOI 10.1002/adom.201900790

    2D materials & thin filmsWaveguides & on-chip THzProbe & instrument development

  8. Diffraction enhanced transparency in a hybrid gold-graphene THz metasurface

    N.J.J. van Hoof, S.E.T. ter Huurne, R.H.J. Vervuurt, et al.,

    APL Photonics 4, 036104 (2019) · DOI 10.1063/1.5080390

    2D materials & thin filmsMetamaterials & plasmonics

2018

  1. Terahertz orbital angular momentum modes with flexible twisted hollow core antiresonant fiber

    Alessio Stefani, Simon C. Fleming, and Boris T. Kuhlmey

    APL Photonics, 3, 051708 (2018) · DOI 10.1063/1.5016283

    Waveguides & on-chip THz

  2. All CVD Boron Nitride Encapsulated Graphene FETs With CMOS Compatible Metal Edge Contacts

    H. Pandey, M. Shaygan, S. Sawallich,, et al.,

    IEEE Trans. on El. Dev., 65, 10 pp. 4129 - 4134 (2018) · DOI 10.1109/TED.2018.2865382

    2D materials & thin filmsProtemics co-author

  3. Towards the Development of THz-Sensors for the Detection of African Trypanosomes

    R. Knieß, C. B. Wagner, H. U. Göhringer, et al.,

    Frequenz, 72, 3-4, pp. 101–111 (2018) · DOI 10.1515/freq-2018-0011

    Bio, pharma & chemistry

  4. Time-resolved terahertz time-domain near-field microscopy

    N. J. J. van Hoof, S. E. T. ter Huurne, J. Gómez Rivas, and A. Halpin.

    Optics Express Vol. 26, Issue 24, pp. 32118-32129 (2018) · DOI 10.1364/OE.26.032118

    Probe & instrument development

  5. Imaging Brain Tissue Slices with Terahertz Near‐Field Microscopy

    Guoshuai Geng, Guangbin Dai, Dandan Li, et al.

    Biotechnol Progress. (2018) · DOI 10.1002/btpr.2741

    Bio, pharma & chemistryProbe & instrument development

  6. Guided terahertz pulsed reflectometry: a remote probe for near-field imaging

    Mingming Pan, Frédéric Fauquet, Dean Lewis, et al.

    Proceedings Volume 10531, Terahertz, RF, Millimeter, and Submillimeter-Wave Technology and Applications XI; 105310L (2018) · DOI 10.1117/12.2290891

    Waveguides & on-chip THzProbe & instrument development

  7. Terahertz spoof surface-plasmon-polariton subwavelength waveguide

    Ying Zhang, Yuehong Xu, Chunxiu Tian, et al.

    Photonics Research Vol. 6, Issue 1, pp. 18-23 (2018) · DOI 10.1364/PRJ.6.000018

    Metamaterials & plasmonicsWaveguides & on-chip THz

2017

  1. Ultrafast magnetization reversal by picosecond electrical pulses

    Yang Yang, Richard B. Wilson, Jon Gorchon, et al.

    Science Advances, Vol. 3 Issue 11 (2017). · DOI 10.1126/sciadv.1603117

    Ultrafast & fundamental physics

  2. Electric current induced ultrafast demagnetization

    Richard B. Wilson, Yang Yang, Jon Gorchon, et al.

    Phys. Rev. B 96, 045105 (2017). · DOI 10.1103/PhysRevB.96.045105

    Ultrafast & fundamental physics

  3. Enablers for IBC: integral cell and module development and implementation in PV industry

    I. Cesar, N. Guillevin, A. A. Mewe, et al.

    Energy Procedia, Vol. 124, pp. 834-841 (2017). · DOI 10.1016/j.egypro.2017.09.355

    Semiconductor & chip inspectionBio, pharma & chemistry

  4. Terahertz diffraction enhanced transparency probed in the near field

    A. Halpin, N. v. Hoof, A. Bhattacharya, C. Mennes, and J. G. Rivas

    Phys. Rev. B 96, 085110 (2017). · DOI 10.1103/PhysRevB.96.085110

    Probe & instrument development

  5. High resolution THz scanning for optimization of dielectric layer opening process on doped Si surfaces

    P. Spinelli, F.J.K. Danzl, D. Deligiannis, et al.

    IEEE 44th Photovoltaic Specialist Conference (PVSC), Washington DC, June 25 - 30 (2017). · Publisher page

    2D materials & thin films

  6. Fiber-Drawn Metamaterial for THz Waveguiding and Imaging

    S. Atakaramians, A. Stefani, H. Li, et al.

    J Infrared Milli Terahz Waves (2017). doi:10.1007/s10762-017-0383-0 · DOI 10.1007/s10762-017-0383-0

    Metamaterials & plasmonicsWaveguides & on-chip THz

  7. Terahertz surface plasmon polariton waveguiding with periodic metallic cylinders

    Ying Zhang, Shaoxian Li, Quan Xu, et al.

    Optics Express Vol. 25, Issue 13, pp. 14397-14405 (2017) · DOI 10.1364/OE.25.014397

    Metamaterials & plasmonics

  8. Visualizing near-field coupling in terahertz dolmens

    A. Halpin, C. Mennes, A. Bhattacharya, and J. Gómez Rivas

    Appl. Phys. Lett. 110, 101105 (2017); doi: 10.1063/1.4978031 · DOI 10.1063/1.4978031

    Metamaterials & plasmonics

  9. Simultaneous measurement of doping concentration and carrier lifetime in silicon using terahertz time-domain transmission

    M. Lenz, C. Matheisen, M. Nagel, and J. Knoch

    Appl. Phys. Lett. 110, 072103 (2017); doi: 10.1063/1.4976314 · DOI 10.1063/1.4976314

    Semiconductor & chip inspectionUltrafast & fundamental physicsProtemics co-author

2016

  1. Photoconductive microprobe based near-field scanning of Terahertz resonances of a single high-index TiO 2 microsphere

    M. Nagel, S. Sawallich, C. Elissalde, P. Mounaix, C. Matheisen

    Infrared, Millimeter, and Terahertz waves (IRMMW-THz), 2016 41th International Conference on, (2016). · Publisher page

    2D materials & thin filmsMetamaterials & plasmonicsProbe & instrument developmentProtemics co-author

  2. Contact-free high-resolution conductivity mapping of large-area graphene covered with an ion gel top-gate

    S. Sawallich, M. Mohsin, C. Matheisen, D. Neumaier, M. Nagel

    Infrared, Millimeter, and Terahertz waves (IRMMW-THz), 2016 41th International Conference on, (2016). · Publisher page

    2D materials & thin filmsProtemics co-author

  3. High resolution sheet resistance mapping to unveil edge effects in industrial IBC solar cells

    P. Spinelli, P. Danzl, N. Guillevin, A. Mewe, S. Sawallich, A. Vlooswijk, Bas van de Loo, Erwin Kessels, Michael Nagel, Ilkay Cesar

    Energy Procedia 92, 218-224 (2016). · Publisher page

    Semiconductor & chip inspection2D materials & thin filmsBio, pharma & chemistryProtemics co-author

  4. Photoconductive Terahertz Near-Field Detectors for Operation With 1550-nm Pulsed Fiber Lasers

    S. Sawallich, B. Globisch, C. Matheisen, M. Nagel, R. JB Dietz, and T. Göbel

    IEEE Transactions on Terahertz Science and Technology, 99, 1-6, (2016). · DOI 10.1109/TTHZ.2016.2549365

    2D materials & thin filmsWaveguides & on-chip THzProbe & instrument developmentProtemics co-author

  5. Large near-to-far field spectral shifts for terahertz resonances

    A. Bhattacharya, G. Georgiou, S. Sawallich, C. Matheisen, M. Nagel, and J. Gómez Rivas

    Phys. Rev. B 93, 035438 (2016). · DOI 10.1103/PhysRevB.93.035438

    Metamaterials & plasmonicsProtemics co-author

2015

  1. Mapping the near-field propagation of surface plasmons on terahertz metasurfaces

    Y. Xu, X. Zhang, Z. Tian, J. Gu, C. Ouyang, Y. Li, J. Han, and W. Zhang

    Appl. Phys. Lett. 107, 021105 (2015). · DOI 10.1063/1.4926967

    Metamaterials & plasmonics

  2. Coplanar stripline (CPS) emitter and transceiver microprobes for ultra-high bandwidth on-chip Terahertz measurements

    C. Matheisen, M. Nagel, S. Sawallich

    Infrared, Millimeter, and Terahertz waves (IRMMW-THz), 2015 40th International Conference on, 1-2 (2015). · Publisher page

    Semiconductor & chip inspectionWaveguides & on-chip THzProbe & instrument developmentProtemics co-author

  3. High-resolution interdigitated back contact solar cell inspection using Terahertz microprobe

    S. Sawallich, C. Matheisen, M. Nagel, I. Cesar

    Infrared, Millimeter, and Terahertz waves (IRMMW-THz), 2015 40th International Conference on, 1-2 (2015). · Publisher page

    Semiconductor & chip inspectionBio, pharma & chemistryProbe & instrument developmentProtemics co-author

  4. Investigation of dopant segregation induced surface-fields using THz pulse transmission

    M. Lenz, A. Kianfar, S. Nordmann, S. Sawallich, M. Nagel, B. Berghoff, and J. Knoch

    IEEE 42nd Photovoltaic Specialist Conference (PVSC), 1-4 (2015). · DOI 10.1109/PVSC.2015.7356422

    Semiconductor & chip inspectionProtemics co-author

  5. Time-domain high-speed read-out of terahertz resonator arrays with sub-single-resonator resolution

    M. Nagel, C. Matheisen, S. Sawallich

    Infrared, Millimeter, and Terahertz waves (IRMMW-THz), 2015 40th International Conference on, 1-2 (2015). · Publisher page

    Metamaterials & plasmonicsProtemics co-author

  6. Photoconductive microprobe enabled on-chip and wafer-scale Terahertz sensing applications

    M. Nagel, C. Matheisen, S. Sawallich, H. Kurz

    Optical Sensors, Optical Society of America, SeM2D.5 (2015). · Publisher page

    Semiconductor & chip inspection2D materials & thin filmsWaveguides & on-chip THzProbe & instrument developmentProtemics co-author

2014

  1. THz near-field microscopy of semiconductor and metal bowtie antennas

    A. Bhattacharya, G. Georgiou, S. Sawallich, C. Matheisen, M. Nagel, J. Gomez Rivas

    Infrared, Millimeter, and Terahertz waves (IRMMW-THz), 2014 39th International Conference on (2014). · Publisher page

    Semiconductor & chip inspectionMetamaterials & plasmonicsProbe & instrument developmentProtemics co-author

  2. Electro-optic light modulation and THz generation in locally plasma-activated silicon nanophotonic devices

    C. Matheisen, M. Waldow, B. Chmielak, S. Sawallich, T. Wahlbrink, J. Bolten, M. Nagel, and H. Kurz

    Opt. Express, Vol. 22, Issue 5, pp. 5252-5259 (2014). · Publisher page

    Semiconductor & chip inspectionProtemics co-author

  3. THz microprobe system for contact-free high-resolution sheet resistance imaging

    M. Nagel, A. Safiei, S. Sawallich, C. Matheisen, T. M. Pletzer, A. A. Mewe, N. J. C. M. van der Borg, I. Cesar, and H. Kurz

    28th European Photovoltaic Solar Energy Conference and Exhibition, pp. 856-860 (2013). · Publisher page

    Semiconductor & chip inspection2D materials & thin filmsProbe & instrument developmentProtemics co-author

2013

  1. Polymer identification with terahertz technology

    A. Maul and M. Nagel

    OCM 2013-Optical Characterization of Materials-conference proceedings, 265 (2013). · Publisher page

    Bio, pharma & chemistryProtemics co-author

  2. Novel techniques in terahertz imaging and sensing

    M. Nagel, C. Matheisen, H. Kurz

    Handbook of Terahertz Technology for Imaging, Sensing and Communications. Edited by D. Saeedkia, Woodhead Publishing Ltd. 2013. · Publisher page

    Probe & instrument developmentProtemics co-author

  3. Experimental demonstration of phase-matched THz generation in plasma-activated silicon nanophotonic emitters

    S. Sawallich, C. Matheisen, M. Nagel, T. Wahlbrink, J. Bolten, H. Kurz

    Infrared, Millimeter, and Terahertz Waves (IRMMW-THz), 2013 38th International Conference on (2013). · Publisher page

    Semiconductor & chip inspectionProbe & instrument developmentProtemics co-author

  4. High-Speed Near-Field Imaging System Based On Photoconductive Terahertz Microprobes

    C. Matheisen, M. Nagel, S. Sawallich, H. Kurz, G. Georgiou, J. Gomez-Rivas

    Infrared, Millimeter, and Terahertz Waves (IRMMW-THz), 2013 38th International Conference on (2013).

    2D materials & thin filmsProbe & instrument developmentProtemics co-author

  5. Terahertz Transceiver Microprobe For Chip-Inspection Applications Using Optoelectronic Time-Domain Reflectometry

    M. Nagel, C. Matheisen, S. Sawallich, H. Kurz, S. Dobritz

    Infrared, Millimeter, and Terahertz Waves (IRMMW-THz), 2013 38th International Conference on (2013).

    Semiconductor & chip inspectionProbe & instrument developmentProtemics co-author

2012

  1. Active Terahertz near-field probes for high-resolution free-carrier density imaging applications

    M. Nagel, A. Safiei, T. Pletzer, H. Kurz

    Infrared, Millimeter, and Terahertz Waves (IRMMW-THz), 2012 37th International Conference on (2012). · DOI 10.1109/IRMMW-THz.2012.6380311

    Probe & instrument developmentUltrafast & fundamental physicsProtemics co-author

  2. Continuous-wave terahertz near-field spectroscopy and imaging with a micro-machined photomixer probe-tip

    M. Nagel, C. Matheisen, A. Deninger, H. Kurz

    Infrared, Millimeter, and Terahertz Waves (IRMMW-THz), 2012 37th International Conference on (2012). · DOI 10.1109/IRMMW-THz.2012.6380278

    Probe & instrument developmentProtemics co-author

2011

  1. Terahertz reflectometry images faults in silicon chips

    M. Nagel and H. Kurz

    Laser Focus World, 47, 11, pp 61-64 (2011) · Publisher page

    Semiconductor & chip inspectionProtemics co-author

  2. Near-field investigation of THz surface-wave emission from optically excited graphite flakes

    M. Nagel, A. Michalski, T. Botzem and H. Kurz

    Opt. Express., 2, 2011. Vol. 19(5), pp. 4667-4672. OSA. · DOI 10.1364/OE.19.004667

    Waveguides & on-chip THzProtemics co-author

  3. Pockels effect based fully integrated, strained silicon electro-optic modulator

    B. Chmielak, M. Waldow, C. Matheisen, C. Ripperda, J. Bolten, T. Wahlbrink, M. Nagel, F. Merget, and H. Kurz

    Optics Express, Vol. 19, Issue 18, pp. 17212-17219 (2011). · DOI 10.1364/OE.19.017212

    Semiconductor & chip inspectionProtemics co-author

  4. Contact-free fault location and imaging with on-chip terahertz time-domain reflectometry

    M. Nagel, A. Michalski and H. Kurz

    Opt. Express., 6, 2011. Vol. 19(13), pp. 12509-12514. · DOI 10.1364/OE.19.012509

    Semiconductor & chip inspectionWaveguides & on-chip THzProtemics co-author

  5. A new technique to measure loss, effective refractive index and electric field distribution of THz porous fibers

    S. Atakaramians, S. Afshar V., M. Nagel, T. M. Monro, and D. Abbott

    CLEO: Science and Innovations, Baltimore, Maryland United States, May 1-6 (2011) · DOI 10.1364/CLEO_SI.2011.CThN3

    Waveguides & on-chip THzProtemics co-author

  6. Direct probing of evanescent field for characterization of porous terahertz fibers

    S. Atakaramians, S. Afshar V., M. Nagel, H. K. Rasmussen, O. Bang, T. M. Monro and D. Abbott

    Appl. Phys. Lett. 98, 121104 (2011) · DOI 10.1063/1.3568892

    Waveguides & on-chip THzProtemics co-author

2010

  1. Optical generation of terahertz and second-harmonic light in plasma-activated silicon nanophotonic structures

    M. Wächter, C. Matheisen, M. Waldow, T. Wahlbrink, J. Bolten, M. Nagel and H. Kurz

    Appl. Phys. Lett. 97, 161107 (2010) · DOI 10.1063/1.3503586

    Semiconductor & chip inspectionProtemics co-author

2009

  1. Fluidic channel waveguide coupler for nl-volume sensing applications

    M. Wächter, M. Nagel and H. Kurz

    Infrared, Millimeter, and Terahertz Waves, 2009. IRMMW-THz 2009. 34th International Conference on · DOI 10.1109/ICIMW.2009.5325764

    Waveguides & on-chip THzProtemics co-author

  2. Terahertz near-field imaging with tapered sommerfeld-wire waveguides

    M. Awad, M. Nagel and H. Kurz

    Infrared, Millimeter, and Terahertz Waves, 2009. IRMMW-THz 2009. 34th International Conference on · DOI 10.1109/ICIMW.2009.5325761

    Waveguides & on-chip THzProbe & instrument developmentProtemics co-author

  3. Free-standing tapered probe-tip for high resolution photoconductive terahertz field sampling

    M. Wächter, M. Nagel and H. Kurz

    Infrared, Millimeter, and Terahertz Waves, 2009. IRMMW-THz 2009. 34th International Conference on · DOI 10.1109/ICIMW.2009.5324971

    2D materials & thin filmsProbe & instrument developmentProtemics co-author

  4. Tapered photoconductive terahertz field probe tip with subwavelength spatial resolution

    M. Wächter, M. Nagel and H. Kurz

    Appl. Phys. Lett. 95, 041112 (2009) · DOI 10.1063/1.3189702

    2D materials & thin filmsProbe & instrument developmentProtemics co-author

  5. Tapered Sommerfeld wire terahertz near-field imaging

    M. Awad, M. Nagel and H. Kurz

    Appl. Phys. Lett. 94, 051107 (2009) · DOI 10.1063/1.3078278

    Waveguides & on-chip THzProbe & instrument developmentProtemics co-author

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